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The Micron-NSU Nanofabrication Cleanroom is a 6, 000 square foot facility housed in the Marie V. McDemmond Center for Applied Research (MCAR) building. It is a Class 100/Class 1 000(ISO Class 5/Class 6) user facility that provides unique processing capabilities not only to NSU researchers, but also to researchers around Hampton Roads and beyond. This cleanroom is a world-class facility that engages teams of NSU researchers in partnership with private industry, government laboratories, and other university investigators in the production of microelectronics, optoelectronics and medical devices on the micro and nano-scale.
This Cleanroom facility is an incubator for the creation of entrepreneurial enterprises that support economic strength in the Hampton Roads Community and world leadership in critical technologies for the United States.
The Micron-NSU Nanofabrication Cleanroom is a shared, state-of-the-art facility that supports a broad range of nanoscale science, engineering and technology projects by providing state-of-the-art equipment and resources coupled with expert staff support and necessary training. Frontend research projects including the fields of physical sciences, material sciences, life sciences, engineering, energy and space sciences are conducted in this cleanroom environment.
Specialized tool sets and technical support are available and ready for various nanofabrication technologies including lithography, thin film deposition, thermal processing and plasma processing. Technical capabilities on nanoscale metrology and characterization include Transmission Electron Microscopy (TEM), Field Emission Electron Scanning Microscopy (FE-SEM) and Energy-Dispersive X-ray analysis (EDX) which are housed in the Characterization space across from the cleanroom. This characterization space also houses an Electron Beam Lithography system with the capability of nanoscale device patterning and further integration with various nanomaterials. With this high-end capability and flexibility, users can freely evaluate advanced and functional materials and transition fundamental research in nanoscience and technology to innovation-driven integrated devices and application systems.
The Micron-NSU Nanofabrication Cleanroom supports many different user groups, including NSU faculty, post-doctoral research fellows, graduate and undergraduate students from NSU, external users from companies, universities and research institutes including NASA Langley Research Center and Jefferson National Laboratory for their research and manufacturing.
Marie V. McDemmond Center for Applied Research
Norfolk State University 555 Park Avenue Norfolk, VA 23504