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About

NSU Cleanroom Facility (NCF) is housed in the Marie V. McDemmond Center of Applied Research Building with the 6,000 square foot space designed to meet the ISO class 100/1000 standard. NSU Cleanroom Facility is a shared, state-of-the-art facility that supports a broad range of nanoscale science, engineering and technology projects by providing state-of-the-art equipment and resources coupled with expert staff support and necessary training. Frontend research projects are conducted including the fields of physical sciences, material sciences, life sciences, engineering, energy and space sciences in this cleanroom environment where the levels of dust, airborne microbes, temperature, and humidity are critically controlled.

Specialized instrument sets and technical support are available and ready for various nanofabrication technologies including lithography, thin film deposition, thermal processing and plasma processing in the NCF. Technical capabilities of nanoscale metrology and characterization include transmission electron microscopy, field emission electron scanning microscopy and energy-dispersive X-ray analysis in an additional 4,000 square foot space which is set next to the cleanroom. The NCF provides user access to an electron beam lithography system with the ability of nanoscale device patterning and further integration with various nanomaterials. With this high-end capability and flexibility in NCF, users can freely investigate novel and functional materials and transition fundamental research in nanoscience to innovation-driven integrated devices and application systems.

The NCF supports many different user groups of faculty, post-doctoral research fellows and graduate students from NSU, and external users from companies, universities and research institutes including NASA Langley Research Center and Jefferson National Laboratory for their research and manufacturing.