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J.A. Woollam V-VASE UV-VIS-NIR spectroscopic ellipsometer
The VASE® is an accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more. It combines high accuracy and precision with a wide spectral range – up to 193 to 3200nm. Variable wavelength and angle of incidence allow flexible measurement capabilities, including:
• Reflection and Transmission Ellipsometry
• Generalized Ellipsometry (Anisotropy, Retardance, Birefringence)
• Reflectance (R) and Transmittance (T) intensity
• Cross-polarized R/T
• Depolarization
• Scatterometry
• Mueller-matrix
Appications
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Optical Coatings
The AutoRetarder® measures Δ accurately even when close to 0° or 180° which helps characterize thin films on transparent substrates, such as glass or plastics. Applications include decorative coatings, anti-reflection and high-reflection layers and stacks, low-emissivity films, electrochromic and photochromic layers and more.
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Laser optics
Accurate wavelength selection using monochromator allows measurements at the operating wavelength for optics, e.g. 1550nm, 1310nm, 980nm, 632.8nm, 589nm …
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Thin FIlms
VASE is sensitive to layer thickness down to sub-nanometer. For absorbing layers, the VASE allows measurement of SE and Transmission Intensity (T). When analyzed simultaneously, SE + T often allow determination of n, k, and t. For example, this thin metal layer is only 14 nm thick.
- 1 nm resolution at 15 kV, 1.4 nm at 1 kV
- 0.5 kV to 30 kV accelerating voltage
- Magnification from 30x to 800,000x
- Maximum specimen size = 100 mm
- Super ExB filter technology
- Dry vacuum system
- X+Y motorized eucentric stage with trackball interface (tilt and Z by manual control)
- Ring-type YAG backscatter detector
- Bruker Quantax EDS System for X-ray spectroscopy.
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