Micro- and Nano-technology Center Cleanroom

College of Science, Engineering, and Technology

Micro- and Nano-technology Center Cleanroom



Facilities & Floorplans

This facility enables the production of microelectronic and optoelectronic devices on the micro- and nano-scale. It is a Class 100/Class 1000 user facility. It provides unique processing capabilities not only for NSU researchers, but also for researchers around the region. MiNaC houses equipment that enables the deposition and etching of thin films, the patterning of devices and micro-structures, and wet chemical processing. This premiere facility enables faculty and student researchers to have access to state-of-the-art equipment, facilitating novel research.

MiNaC Floor Plan